JPH047927Y2 - - Google Patents
Info
- Publication number
- JPH047927Y2 JPH047927Y2 JP18153086U JP18153086U JPH047927Y2 JP H047927 Y2 JPH047927 Y2 JP H047927Y2 JP 18153086 U JP18153086 U JP 18153086U JP 18153086 U JP18153086 U JP 18153086U JP H047927 Y2 JPH047927 Y2 JP H047927Y2
- Authority
- JP
- Japan
- Prior art keywords
- cutting
- wafer
- single crystal
- blade
- inner peripheral
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 35
- 238000005520 cutting process Methods 0.000 claims description 32
- 239000013078 crystal Substances 0.000 claims description 17
- 230000002093 peripheral effect Effects 0.000 claims description 17
- 239000004065 semiconductor Substances 0.000 claims description 13
- 239000012634 fragment Substances 0.000 claims description 7
- 230000000694 effects Effects 0.000 description 4
- 238000003908 quality control method Methods 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 239000010953 base metal Substances 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 239000002173 cutting fluid Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 231100000989 no adverse effect Toxicity 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18153086U JPH047927Y2 (en]) | 1986-11-26 | 1986-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18153086U JPH047927Y2 (en]) | 1986-11-26 | 1986-11-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6387005U JPS6387005U (en]) | 1988-06-07 |
| JPH047927Y2 true JPH047927Y2 (en]) | 1992-02-28 |
Family
ID=31126484
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18153086U Expired JPH047927Y2 (en]) | 1986-11-26 | 1986-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH047927Y2 (en]) |
-
1986
- 1986-11-26 JP JP18153086U patent/JPH047927Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6387005U (en]) | 1988-06-07 |
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